产品与应用
- 光刻胶
- 抗反射涂层
- 聚酰亚胺
- 超高纯试剂
- 无尘耗材
光刻胶
| 型号 | 胶厚 | 分辨率 | 应用场景 | BL PR |
| G/I line正胶系列 | 7000Å-12000Å | 0.3um | 0.3um Process | SPR955/PFI-58/AR89 |
| 10000Å-35000Å | 0.5um | 0.5um Process | MIR701 29CP | |
| 30000Å-50000Å | 0.5um | 0.5um Process | MIR701 49CP/AZ6130 | |
| 30000Å-50000Å | 1.5um | Implant/Passivation | IP5800/IP5700 | |
| 40000Å-80000Å | 1.5um | Implant/Passivation | / | |
| 2um-10um | 0.8um | Implant/Passivation | ZR8690/CY1000 | |
| 5um-25um | 5um | Packaging Bumping | P4620 | |
| Lift offf负胶 | 3um-10um | 2um | Lift off Metal Process | IN057/IN009 |
| 1.8um-25um | 0.6um | Lift off Metal Process | / |
抗反射涂层
| 型号 | 厚度 | N/K | Etch Rate | BL Barc |
| TUI1000 | 1000Å-2000Å | n@365nm/1.81, k@365nm/0.34 | / | XHRiC-11/16 |
| TUK1000 | 600Å-900Å | n@248nm/1.49, k@248nm/0.42 | 84.4nm/min@CF4/CHF3 | DUV42/44 |
| TUK2000 | ||||