|
类型 |
型号 |
厚度 |
N/K |
Etch Rate |
BL Barc |
|
Iline Barc |
TUI1000 |
1000Å~2000Å |
n@365nm/1.81,
k@365nm/0.34 |
/ |
XHRiC-11/16 |
|
KrF Barc |
TUK1000 |
600Å~900Å |
n@248nm/1.49,
k@248nm/0.42 |
84.4nm/min@CF4/CHF3 |
DUV4* |
|
TUK2000 |
700Å-950Å |
n@248nm/1.51,
k@248nm/0.197 |
115.2nm/min@CF4/CHF3 |
DUV1*2 |
|
TUK3000 |
1100Å~1600Å |
n@248nm/1.72,
k@248nm/0.19 |
165.1nm/min@CF4/CHF3 |
AR2*4 |
|
ArF Barc |
TUA1000 |
700Å~1100Å |
n@193nm/1.84,
k@193nm/0.33 |
165.1nm/min@CF4/CHF3/N2 |
ARC29 |
|
TUA2000 |
700Å~1000Å |
n@193nm/1.8,
k@193nm/0.25 |
19.74Å/min@CF4/CHF3/N2 |
ARC68 |
|
TUA3000 |
180Å~300Å |
n@193nm/1.95,
k@193nm/0.28 |
Fast Etch |
ARC2*2-302.8 |
